Keyword:Semiconductor Manufacturing

Publications
Semiconductor Manufacturing Industry: Assessment, Challenges, and Future Trends Yasmin Musa, Khalid Tantawi, Maged Mikhail, Jeffrey Ma, Dalal Alharthi, Larry Flatt and Lyn Potter EasyChair Preprint 15798
Scheduling of Multi-Finger-Robotic Cluster Tools with Multi-Space Process Modules Lei Gu, Naiqi Wu, Yan Qiao and Siwei Zhang EasyChair Preprint 15315
An Efficient Integrated Scheduling Method for Twin-Cluster Tools with Buffer Space Configuration Yiming Lai, Chunrong Pan, Wenqing Xiong, Jinchao Fu, Yu Cui and Hao Zhou EasyChair Preprint 11230